
MEMS Foundry
STANDARD THIN
FILM PROCESSES
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| PLATINUM SILICIDE, PALLADIUM SILICIDE |
| TiW/Au METALLIZATIONS FOR BIPOLAR AND DMOS, LDMOS RF DEVICES |
| Ti/Ni/Ag BACKSIDE METALLIZATIONS FOR SOFT SOLDER DIE ATTACHING |
| Ti/Ni/Ag DEPOSITION and LIFT-OFF PROCESS |
| Ti/Pd/Au DEPOSITION and LIFT-OFF PROCESS |
| Au BACKSIDE METALLIZATIONS |
| Au BUMP PROCESS FOR FLIP CHIP APPLICATIONS |
| SOLDER BUMP PROCESS FOR FLIP CHIP APPLICATONS |
| HTELabs, 2964-2966 Scott Blvd. Santa Clara, CA 95054 |
| Tel:(408)-986-8026, Fax:(408)-850-1910 |
| http://www.mems-foundry.com |